diff --git a/scripts/Makefile.lib b/scripts/Makefile.lib
index 8337663aa298..f97869f1f09b 100644
--- a/scripts/Makefile.lib
+++ b/scripts/Makefile.lib
@@ -149,7 +149,7 @@ cpp_flags      = -Wp,-MD,$(depfile) $(NOSTDINC_FLAGS) $(LINUXINCLUDE)     \
 
 ld_flags       = $(LDFLAGS) $(ldflags-y)
 
-dtc_cpp_flags  = -Wp,-MD,$(depfile).pre -nostdinc                        \
+dtc_cpp_flags  = -Wp,-MD,$(depfile).pre.tmp -nostdinc                    \
 		 -I$(srctree)/arch/$(SRCARCH)/boot/dts                   \
 		 -I$(srctree)/arch/$(SRCARCH)/boot/dts/include           \
 		 -undef -D__DTS__
@@ -265,13 +265,13 @@ quiet_cmd_dtc = DTC     $@
 cmd_dtc = $(CPP) $(dtc_cpp_flags) -x assembler-with-cpp -o $(dtc-tmp) $< ; \
 	$(objtree)/scripts/dtc/dtc -O dtb -o $@ -b 0 \
 		-i $(dir $<) $(DTC_FLAGS) \
-		-d $(depfile).dtc $(dtc-tmp) ; \
-	cat $(depfile).pre $(depfile).dtc > $(depfile)
+		-d $(depfile).dtc.tmp $(dtc-tmp) ; \
+	cat $(depfile).pre.tmp $(depfile).dtc.tmp > $(depfile)
 
 $(obj)/%.dtb: $(src)/%.dts FORCE
 	$(call if_changed_dep,dtc)
 
-dtc-tmp = $(subst $(comma),_,$(dot-target).dts)
+dtc-tmp = $(subst $(comma),_,$(dot-target).dts.tmp)
 
 # Bzip2
 # ---------------------------------------------------------------------------